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Its unique low-power plasma technology delivers exceptionally high destruction rate efficiency (DRE) for PFC gases such as CF4, as well as other greenhouse gases like SF6, NF3, and N2O. This makes Proteus one of the most cost-effective solutions for reducing greenhouse gas emissions in semiconductor manufacturing processes.

Washable

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Washable

The water-washing exhaust gas treatment system utilizes water absorption to treat exhaust gases generated during semiconductor manufacturing processes, ensuring that emissions meet national discharge standards before release. In addition, certain gases, such as NH3 and HCl, can be recovered and reused.

Hot water washing

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Hot water washing

Electric-heated exhaust gas treatment equipment uses indirect combustion heating rods or heating tapes to generate temperatures exceeding 800°C, enabling the high-temperature treatment of flammable, toxic, and PFC-containing gases. Under these high-temperature conditions, the process gases undergo chemical reactions with oxygen, followed by water scrubbing and filtration in a water tank and cooling tower. The final effluents consist of acidic and alkaline wastewater and exhaust air. This technology delivers outstanding performance in treating flammable, explosive, toxic, and water-soluble gases, achieving a removal efficiency of up to 99%. It also boasts advantages such as a simple structure, easy operation, convenient maintenance, large processing capacity, and straightforward upkeep.

Dry Adsorption

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Dry Adsorption

Special gases are safely treated by chemically reacting with an adsorbent. During this process, the special gases come into contact with the adsorbent, and through chemical reactions, the harmful components in the exhaust gas are converted into harmless substances or immobilized on the adsorbent surface, achieving a treatment efficiency of up to 99.9%. This technology offers advantages such as low operating costs, easy maintenance, stable operation, zero wastewater generation, and automatic backup of the adsorption vessels.

Exhaust Gas Treatment

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Exhaust Gas Treatment

Wet Scrubber for Exhaust Gas Treatment

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Wet Scrubber for Exhaust Gas Treatment

Product Application: The wet scrubber is a specialized system designed to treat various process exhaust gases on-site. During the water-solubilization process, the exhaust gases generated by the manufacturing processes are converted into water-soluble compounds, which are then further treated in a subsequent stage before being discharged into the plant’s wastewater treatment system. The exhaust gases handled by this system include most of the specialty gases used in semiconductor fabs. Moreover, the equipment requires infrequent and short-duration maintenance, ensuring that production schedules remain unaffected.

Adsorption-based exhaust gas treatment equipment

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Adsorption-based exhaust gas treatment equipment

Product functions and principles: Depending on the properties of the medium to be treated, different dry chemical agents are selected. These agents undergo acid–base neutralization reactions, double-displacement reactions, and other fundamental chemical processes with the medium, thereby forming stable, non-toxic, and harmless compounds or complexes. These compounds or complexes can be reused in road maintenance and solid-waste landfill operations, without generating secondary pollution.

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