• Hot water washing
Hot water washing
+

Hot water washing

Electric-heated exhaust gas treatment equipment uses indirect combustion heating rods or heating tapes to generate temperatures exceeding 800°C, enabling the high-temperature treatment of flammable, toxic, and PFC-containing gases. Under these high-temperature conditions, the process gases undergo chemical reactions with oxygen, followed by water scrubbing and filtration in a water tank and cooling tower. The final effluents consist of acidic and alkaline wastewater and exhaust air. This technology delivers outstanding performance in treating flammable, explosive, toxic, and water-soluble gases, achieving a removal efficiency of up to 99%. It also boasts advantages such as a simple structure, easy operation, convenient maintenance, large processing capacity, and straightforward upkeep.
Keyword: Hot water washing
Message

Category:

Scrubber Treatment Equipment

Application process: CVD/ALD facility services, etc.

Processing capacity: 500L/70OL/1500L

Gas handling: SiH4, SiHCl3, HCl, DCS, TEOS, TMA, etc.

Processing efficiency: Gas treatment efficiency reaches 99%.

Parameter specifications:

Content

Description

Requirements Specification

Model

YYKJ-1500HW

Power supply

Rated power

208/380 VAC, 3-phase, 50/60 Hz

Actual power

External dimensions

1,440 (W) × 800 (D) × 2,100 (H) mm (cabinet top base)

Air intake

Four air intakes

CDA

1st gas flange 100 ~ 200 LPM (Max)

300 ~ 600 LPM

(4 ~ 6 kg/cm²)

2nd combustion chamber: 100–200 LPM (max)

Air curtain 100 ~ 200 LPM (Max)

CW

10 ~ 20 LPM (3 ~ 5 kg/cm²)

N2

Intake Purge (Hot N2)

200 ~ 300 MAX LPM (4 ~ 5 kg/cm²) 25 ~ 30 LPM × 8 ports

Drainage

Pump discharge

Exhaust

Acid discharge

-80 ~ -100 mmH2O

Heat dissipation

-20 mmH2O

Hot water washing

Category:

Scrubber Treatment Equipment

Electric-heated exhaust gas treatment equipment uses indirect combustion heating rods or heating tapes to generate temperatures exceeding 800°C, enabling the high-temperature treatment of flammable, toxic, and PFC-containing gases. Under these high-temperature conditions, the process gases undergo chemical reactions with oxygen, followed by water scrubbing and filtration in a water tank and cooling tower. The final effluents consist of acidic and alkaline wastewater and exhaust air. This technology delivers outstanding performance in treating flammable, explosive, toxic, and water-soluble gases, achieving a removal efficiency of up to 99%. It also boasts advantages such as a simple structure, easy operation, convenient maintenance, large processing capacity, and straightforward upkeep.
Keyword: Hot water washing
Message
Related
  • Product Description

  • Application process: CVD/ALD facility services, etc.

    Processing capacity: 500L/70OL/1500L

    Gas handling: SiH4, SiHCl3, HCl, DCS, TEOS, TMA, etc.

    Processing efficiency: Gas treatment efficiency reaches 99%.

    Parameter specifications:

    Content

    Description

    Requirements Specification

    Model

    YYKJ-1500HW

    Power supply

    Rated power

    208/380 VAC, 3-phase, 50/60 Hz

    Actual power

    External dimensions

    1,440 (W) × 800 (D) × 2,100 (H) mm (cabinet top base)

    Air intake

    Four air intakes

    CDA

    1st gas flange 100 ~ 200 LPM (Max)

    300 ~ 600 LPM

    (4 ~ 6 kg/cm²)

    2nd combustion chamber: 100–200 LPM (max)

    Air curtain 100 ~ 200 LPM (Max)

    CW

    10 ~ 20 LPM (3 ~ 5 kg/cm²)

    N2

    Intake Purge (Hot N2)

    200 ~ 300 MAX LPM (4 ~ 5 kg/cm²) 25 ~ 30 LPM × 8 ports

    Drainage

    Pump discharge

    Exhaust

    Acid discharge

    -80 ~ -100 mmH2O

    Heat dissipation

    -20 mmH2O

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