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Dry Adsorption

Special gases are safely treated by chemically reacting with an adsorbent. During this process, the special gases come into contact with the adsorbent, and through chemical reactions, the harmful components in the exhaust gas are converted into harmless substances or immobilized on the adsorbent surface, achieving a treatment efficiency of up to 99.9%. This technology offers advantages such as low operating costs, easy maintenance, stable operation, zero wastewater generation, and automatic backup of the adsorption vessels.

Keyword: Dry Adsorption

Message

Category:

Scrubber Treatment Equipment

Application process: IMP/CVD/ALD facility services, etc.

Processing capacity: 100L/200L/400L/800L

Gas handling: BF3, PH3, ASH3, etc.

Processing efficiency: Gas treatment efficiency reaches 99.5%; NF3 efficiency is 99.9%.

Parameter specifications:

Content		Description
		Requirements Specification
Model		YYKJ-100S/200S/200D
Power supply	Rated power	220 VAC, 3-phase, 50/60 Hz
	Actual power
External dimensions		1,600(W) x 600(D) x 2,000(H) mm (Cabinet top base)
Air intake		4/6/8 air inlets
N2	Intake Purge (Hot N2)	200~300 MAX LPM (4~5 kg/cm ²) 25–30 LPM × 8 ports
Exhaust	Acid discharge	-80 ~ -100 mmH ₂ O
	Heat dissipation	-20 mmH ₂ O

Dry Adsorption

Category:

Scrubber Treatment Equipment

Keyword: Dry Adsorption

Message

Product Description

Application process: IMP/CVD/ALD facility services, etc.

Processing capacity: 100L/200L/400L/800L

Gas handling: BF3, PH3, ASH3, etc.

Processing efficiency: Gas treatment efficiency reaches 99.5%; NF3 efficiency is 99.9%.

Parameter specifications:

Content		Description
		Requirements Specification
Model		YYKJ-100S/200S/200D
Power supply	Rated power	220 VAC, 3-phase, 50/60 Hz
	Actual power
External dimensions		1,600(W) x 600(D) x 2,000(H) mm (Cabinet top base)
Air intake		4/6/8 air inlets
N2	Intake Purge (Hot N2)	200~300 MAX LPM (4~5 kg/cm ²) 25–30 LPM × 8 ports
Exhaust	Acid discharge	-80 ~ -100 mmH ₂ O
	Heat dissipation	-20 mmH ₂ O

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