Chemical Supply System
The chemical supply system comprises three primary chemical subsystems: the chemical polishing solution system, the organic solvent system, and the acid–base system. Depending on the customer’s process flow requirements and the types of chemicals used, chemical supply packaging options include 200-L drums, 1,000-L totes, and lorry tanks. Supply is delivered either by pump or nitrogen pressure, with the chemical supply cabinet routing chemicals via connected piping to the SUB-FAB. Corresponding T-boxes and VMB distribution boxes then deliver the chemicals to the respective process equipment.
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No. 99, Baiyun Road, Economic and Technological Development Zone, Hefei City, Anhui Province
