Plasma water washing
Category:
Application process: ETCH/VCD/MOCVD/Photovoltaics/Facilities, etc.
Processing capacity: 500SLM/1500SLM/3000SLM
Gas handling: SF6/CF4/CHF3/H2/PH3, etc.
Processing efficiency: Gas treatment efficiency reaches 99%, with NF3 efficiency at 98%.
Parameter specifications:
|
Content |
Description |
|||
|
Requirements Specification |
Connection Specifications |
|||
|
Model |
YYKJ-1500PW |
NA |
||
|
Power supply |
Rated power |
208/380 VAC, 3-phase, 50/60 Hz |
25kW |
|
|
Actual power |
Typical mode: 13 kW, plasma 7–9 kW |
|||
|
External dimensions |
1,440(W) x 1,300(D) x 2,000(H) mm (cabinet top base) |
|||
|
Air intake |
6 air intakes |
NW50 KF FLANGE |
||
|
PCW |
15 ~20 LPM (3 ~ 5 kg/cm²) |
In & Out: 1/2”, Swagelok |
||
|
CDA |
1st gas flange 100 ~200 LPM (Max) |
300 ~600 LPM (4 ~6 kg/cm²) |
3/4”, Swagelok |
|
|
2nd combustion chamber: 100–200 LPM (max) |
||||
|
Air curtain 100 ~200 LPM (Max) |
||||
|
CW |
10 ~20 LPM (3 ~5 kg/cm2) |
1/2”, Swagelok |
||
|
N2 |
Plasma torch |
60 ~80 MAX LPM (4 ~ 5 kg/cm²) |
1/2”, Swagelok |
|
|
Intake Purge (Hot N2) |
200–300 MAX LPM (4–5 kg/cm²) 25–30 LPM × 8 ports |
|||
|
Drainage |
Pump discharge |
25A PVC |
||
|
Exhaust |
Acid discharge |
-80 ~ -100 mmH2O |
MF 100 FLANGE |
|
|
Heat dissipation |
-20 mmH2O |
. 100 PIPE |
||
Plasma water washing
Category:
- Product Description
-
Application process: ETCH/VCD/MOCVD/Photovoltaics/Facilities, etc.
Processing capacity: 500SLM/1500SLM/3000SLM
Gas handling: SF6/CF4/CHF3/H2/PH3, etc.
Processing efficiency: Gas treatment efficiency reaches 99%, with NF3 efficiency at 98%.
Parameter specifications:
Content
Description
Requirements Specification
Connection Specifications
Model
YYKJ-1500PW
NA
Power supply
Rated power
208/380 VAC, 3-phase, 50/60 Hz
25kW
Actual power
Typical mode: 13 kW, plasma 7–9 kW
External dimensions
1,440(W) x 1,300(D) x 2,000(H) mm (cabinet top base)
Air intake
6 air intakes
NW50 KF FLANGE
PCW
15 ~20 LPM (3 ~ 5 kg/cm²)
In & Out: 1/2”, Swagelok
CDA
1st gas flange 100 ~200 LPM (Max)
300 ~600 LPM (4 ~6 kg/cm²)
3/4”, Swagelok
2nd combustion chamber: 100–200 LPM (max)
Air curtain 100 ~200 LPM (Max)
CW
10 ~20 LPM (3 ~5 kg/cm2)
1/2”, Swagelok
N2
Plasma torch
60 ~80 MAX LPM (4 ~ 5 kg/cm²)
1/2”, Swagelok
Intake Purge (Hot N2)
200–300 MAX LPM (4–5 kg/cm²) 25–30 LPM × 8 ports
Drainage
Pump discharge
25A PVC
Exhaust
Acid discharge
-80 ~ -100 mmH2O
MF 100 FLANGE
Heat dissipation
-20 mmH2O
. 100 PIPE
Related Products
BSGS High-Flow Specialty Gas Delivery Equipment
MESSAGE
If you have any suggestions, please leave a message or send us an email, and we will reply to you as soon as possible after receiving your message.
Phone
Address
No. 99, Baiyun Road, Economic and Technological Development Zone, Hefei City, Anhui Province