Wet Scrubber for Exhaust Gas Treatment
Category:
2.1 Product Overview
Product用途: A wet scrubber is a specialized system designed to treat various process exhaust gases on-site. During the water-solubilization process, the exhaust gases generated by the manufacturing processes are converted into water-soluble compounds, which are then routed through an additional treatment stage before being discharged into the plant’s wastewater treatment system. The exhaust gases handled by this system include most of the specialty gases used in semiconductor fabs. Moreover, the scrubber requires infrequent and short-duration maintenance, ensuring that production schedules remain unaffected.
Product functions and principles: During the water dissolution process, exhaust gases generated by the manufacturing process are converted into water-soluble substances and then discharged into the plant’s wastewater treatment system via a subsequent treatment step. By-products such as particulates are collected through a dedicated collection system.
Advantages: The gases handled include NH3, HCl, BCl3, Cl2, and others. The entire unit features an aesthetically pleasing design that meets stringent safety standards, delivering high processing capacity, exceptional efficiency, and reliable long-term operation. It is easy to operate, requires simple and quick maintenance, and utilizes durable, long-lasting components.
Product Applications: Supporting equipment such as MOCVD, PECVD, and etching machines is used to treat exhaust gases generated during processes in the semiconductor and solar-cell industries.
Wet Scrubber for Exhaust Gas Treatment
Category:
- Product Description
-
2.1 Product Overview
Product用途: A wet scrubber is a specialized system designed to treat various process exhaust gases on-site. During the water-solubilization process, the exhaust gases generated by the manufacturing processes are converted into water-soluble compounds, which are then routed through an additional treatment stage before being discharged into the plant’s wastewater treatment system. The exhaust gases handled by this system include most of the specialty gases used in semiconductor fabs. Moreover, the scrubber requires infrequent and short-duration maintenance, ensuring that production schedules remain unaffected.
Product functions and principles: During the water dissolution process, exhaust gases generated by the manufacturing process are converted into water-soluble substances and then discharged into the plant’s wastewater treatment system via a subsequent treatment step. By-products such as particulates are collected through a dedicated collection system.
Advantages: The gases handled include NH3, HCl, BCl3, Cl2, and others. The entire unit features an aesthetically pleasing design that meets stringent safety standards, delivering high processing capacity, exceptional efficiency, and reliable long-term operation. It is easy to operate, requires simple and quick maintenance, and utilizes durable, long-lasting components.
Product Applications: Supporting equipment such as MOCVD, PECVD, and etching machines is used to treat exhaust gases generated during processes in the semiconductor and solar-cell industries.
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