Bulk Gas Transportation Solutions
Bulk gas systems consist of a gas supply system and a delivery pipeline system, with the gas supply system further subdivided into components such as the gas source, purification, and quality monitoring.
Typically, in the design phase, the gas supply is centralized in a dedicated Gas Yard located separately from the fabrication (FAB) facility, while gas purification is carried out in a dedicated Purifier Room within the FAB. This arrangement minimizes the length of high-purity gas piping, thereby ensuring gas quality while also controlling costs.
The bulk gas distribution system primarily refers to the piping network that uses a bulk gas station as the supply source and connects the station to gas-consuming areas such as cleanrooms, power stations, and various support zones. The system is predominantly pipeline-based, with valves provided at each gas-consuming area and flow meters and pressure sensors installed along the pipelines to monitor system operation.
Semiconductor manufacturing processes not only impose extremely stringent requirements on gas purity but also on the particle content in the gases. Currently, in integrated circuit chip production, the typical specification for bulk gases is zero particles larger than 0.1 μm. Particle removal is achieved through the use of gas filters.
Phone
Address
No. 99, Baiyun Road, Economic and Technological Development Zone, Hefei City, Anhui Province
