Washable
Category:
Application process: LPCVD/PECVD/MOCVD/ETCH/EPI
Processing capacity: 600SLM/1500SLM
Gas handling: CL2, BCL3, NH3, etc.
Processing efficiency: Gas treatment efficiency reaches 99%.
Parameter specifications:
|
Content |
Description |
|
|
Requirements Specification |
||
|
Model |
YYKJ-500W |
|
|
Power supply |
Rated power |
208/380 VAC, 3-phase, 50/60 Hz |
|
Actual power |
||
|
External dimensions |
830(W) x 730(D) x 1800(H) mm (cabinet top base) |
|
|
Air intake |
Four air intakes |
|
|
CW |
5–10 LPM (3–5 kg/cm²) |
|
|
N2 |
Intake Purge (Hot N2) |
200–300 LPM max (4–5 kg/cm²), 25–30 LPM × 8 ports |
|
Drainage |
Pump discharge |
|
|
Exhaust |
Acid discharge |
-80 ~ -100 mmH2O |
|
Heat dissipation |
-20 mmH2O |
|
Washable
Category:
- Product Description
-
Application process: LPCVD/PECVD/MOCVD/ETCH/EPI
Processing capacity: 600SLM/1500SLM
Gas handling: CL2, BCL3, NH3, etc.
Processing efficiency: Gas treatment efficiency reaches 99%.
Parameter specifications:
Content
Description
Requirements Specification
Model
YYKJ-500W
Power supply
Rated power
208/380 VAC, 3-phase, 50/60 Hz
Actual power
External dimensions
830(W) x 730(D) x 1800(H) mm (cabinet top base)
Air intake
Four air intakes
CW
5–10 LPM (3–5 kg/cm²)
N2
Intake Purge (Hot N2)
200–300 LPM max (4–5 kg/cm²), 25–30 LPM × 8 ports
Drainage
Pump discharge
Exhaust
Acid discharge
-80 ~ -100 mmH2O
Heat dissipation
-20 mmH2O
Related Products
BSGS High-Flow Specialty Gas Delivery Equipment
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Address
No. 99, Baiyun Road, Economic and Technological Development Zone, Hefei City, Anhui Province