Valve Plate (VMP)
Category:
4.1 Product Overview
Product用途: The Valve Manifold Panel (hereinafter referred to as the Valve Panel, abbreviated as VMP in English) is an open-type process gas distribution unit used for secondary pressure regulation of process gases and for distributing process gases to process equipment.
Product functions and principles: The valve manifold has a simple structure, consisting solely of process valve fittings and a stainless steel base plate. The manifold’s valve faces enable adjustment of gas pressure and control over the on/off status of each branch line; in most cases, all operations are performed manually.
Product Applications: The products are widely used in semiconductor chip manufacturing, the flat-panel display industry, the LED industry, solar cell production, and electronic component manufacturing, primarily for the conveyance of inert, high-purity gases.
4.2 Product Segmentation Series and Configurations
|
Series Name |
Main Configuration |
Applicable Operating Conditions |
General Configuration |
General Parameters |
|
Manual Branch with Filter Series |
Configure Branch Filter | Suitable for inert gas applications where the front- and back-end systems are filter-free. |
Fully manual operation; equipped with a main-line expansion valve; equipped with a branch-line pressure-regulating valve. |
Equipment dimensions: to be determined based on the specific model; Valve and pipe fitting specifications: dimensions and specifications to be determined based on the specific model, EP. |
| Manual Branch Non-Filter Series | No-branch filter | Suitable for inert gas applications with filters in both the upstream and downstream systems. |
Valve Plate (VMP)
Category:
- Product Description
-
4.1 Product Overview
Product用途: The Valve Manifold Panel (hereinafter referred to as the Valve Panel, abbreviated as VMP in English) is an open-type process gas distribution unit used for secondary pressure regulation of process gases and for distributing process gases to process equipment.
Product functions and principles: The valve manifold has a simple structure, consisting solely of process valve fittings and a stainless steel base plate. The manifold’s valve faces enable adjustment of gas pressure and control over the on/off status of each branch line; in most cases, all operations are performed manually.
Product Applications: The products are widely used in semiconductor chip manufacturing, the flat-panel display industry, the LED industry, solar cell production, and electronic component manufacturing, primarily for the conveyance of inert, high-purity gases.
4.2 Product Segmentation Series and Configurations
Series Name
Main Configuration
Applicable Operating Conditions
General Configuration
General Parameters
Manual Branch with Filter Series
Configure Branch Filter Suitable for inert gas applications where the front- and back-end systems are filter-free. Fully manual operation; equipped with a main-line expansion valve; equipped with a branch-line pressure-regulating valve.
Equipment dimensions: to be determined based on the specific model; Valve and pipe fitting specifications: dimensions and specifications to be determined based on the specific model, EP.
Manual Branch Non-Filter Series No-branch filter Suitable for inert gas applications with filters in both the upstream and downstream systems.
Related Products
BSGS High-Flow Specialty Gas Delivery Equipment
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