MIXER Gas Mixing Equipment
Category:
Application areas: Gas blending equipment that uses MFCs to precisely control the flow of two or more gases, followed by concentration analysis to ensure the blended gas meets the customer’s specified concentration, and then safely and reliably delivers the gas to the process equipment.
Process Application: MFC controls the flow rate, a concentration analyzer measures the concentration, a buffer tank stores the gas, and the mixed gas is continuously delivered.
Customer Type: Semiconductor chip manufacturing, flat-panel display industry, solar cells, electronic component manufacturing, and other industries
|
Parameter Name |
Detailed Specifications |
|
Gas mixing type: |
Binary gas or multicomponent gas |
|
Panel dimensions: |
1/4”, 1/2”, 3/4” |
|
Supply Capacity: |
0–2000 slpm (depending on the gas medium) |
|
Basic functions: |
Automatic purging, automatic vacuum pumping, MFC-controlled flow, automatic shutoff, touch-screen operation |
|
General optional features: |
Concentration analyzer, number of buffer tanks |
|
Media-specific optional features: |
Buffer tank heating, tray heating |
MIXER Gas Mixing Equipment
Category:
- Product Description
-
Application areas: Gas blending equipment that uses MFCs to precisely control the flow of two or more gases, followed by concentration analysis to ensure the blended gas meets the customer’s specified concentration, and then safely and reliably delivers the gas to the process equipment.
Process Application: MFC controls the flow rate, a concentration analyzer measures the concentration, a buffer tank stores the gas, and the mixed gas is continuously delivered.
Customer Type: Semiconductor chip manufacturing, flat-panel display industry, solar cells, electronic component manufacturing, and other industries
Parameter Name
Detailed Specifications
Gas mixing type:
Binary gas or multicomponent gas
Panel dimensions:
1/4”, 1/2”, 3/4”
Supply Capacity:
0–2000 slpm (depending on the gas medium)
Basic functions:
Automatic purging, automatic vacuum pumping, MFC-controlled flow, automatic shutoff, touch-screen operation
General optional features:
Concentration analyzer, number of buffer tanks
Media-specific optional features:
Buffer tank heating, tray heating
Related Products
BSGS High-Flow Specialty Gas Delivery Equipment
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No. 99, Baiyun Road, Economic and Technological Development Zone, Hefei City, Anhui Province