LDS Liquid Source Delivery Equipment
Category:
Application areas: The semiconductor material delivery system primarily uses a carrier gas to deliver liquid-source semiconductor materials to process equipment with high precision, safety, and stability.
Process Application: Continuous liquid-source delivery, carrier-gas-assisted transport, and MFC-controlled flow.
Customer Type: Semiconductor chip manufacturing, flat-panel display industry, solar cells, electronic component manufacturing, and other industries
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Parameter Name |
Detailed Specifications |
|
Supply Type: |
Single cylinder + buffer tank, dual cylinders |
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Panel dimensions: |
1/4", 1/2" |
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Media Name: |
TMA, TEOS, TEB, TEPO, MTS, TCS, SiCl4, TiCl4, etc. |
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Basic functions: |
Automatic purging, automatic vacuuming, automatic switching, automatic shutdown, touch-screen operation |
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General optional features: |
Waste liquid tank, dual-bottle supply (source liquid bottle), 1+1 dual-bottle supply (original liquid bottle + buffer tank) |
|
Media-specific optional features: |
Electronic scale, cylinder heating, pan heating, helium removal unit |
LDS Liquid Source Delivery Equipment
Category:
- Product Description
-
Application areas: The semiconductor material delivery system primarily uses a carrier gas to deliver liquid-source semiconductor materials to process equipment with high precision, safety, and stability.
Process Application: Continuous liquid-source delivery, carrier-gas-assisted transport, and MFC-controlled flow.
Customer Type: Semiconductor chip manufacturing, flat-panel display industry, solar cells, electronic component manufacturing, and other industries
Parameter Name
Detailed Specifications
Supply Type:
Single cylinder + buffer tank, dual cylinders
Panel dimensions:
1/4", 1/2"
Media Name:
TMA, TEOS, TEB, TEPO, MTS, TCS, SiCl4, TiCl4, etc.
Basic functions:
Automatic purging, automatic vacuuming, automatic switching, automatic shutdown, touch-screen operation
General optional features:
Waste liquid tank, dual-bottle supply (source liquid bottle), 1+1 dual-bottle supply (original liquid bottle + buffer tank)
Media-specific optional features:
Electronic scale, cylinder heating, pan heating, helium removal unit
Related Products
BSGS High-Flow Specialty Gas Delivery Equipment
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