Liquid-Source Evaporation Chamber
Category:
Application areas: The semiconductor material delivery system primarily utilizes a carrier gas and incorporates an oil-bath temperature-control unit to heat the delivery vessel, converting liquid-source semiconductor materials into gaseous form. This enables highly precise, safe, and stable delivery to process equipment.
Process Application: Continuous vapor delivery from a liquid-source vaporizer, carrier-gas transport, MFC-controlled flow, oil-bath heating, and CEM evaporation, among others.
Customer Type: Semiconductor chip manufacturing, flat-panel display industry, solar cells, electronic component manufacturing, and other industries
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Parameter Name |
Detailed Specifications |
|
Supply Type: |
Single cylinder + buffer tank, dual cylinders |
|
Board dimensions: |
1/4", 1/2" |
|
Media Name: |
TMA, TEOS, TEB, TEPO, MTS, TCS, SiCl4, TiCl4, etc. |
|
Basic functions: |
Automatic purging, automatic vacuuming, automatic switching, automatic shutdown, touch-screen operation |
|
General optional features: |
Waste liquid tank, dual-bottle supply (source liquid bottle), 1+1 dual-bottle supply (original liquid bottle + buffer tank), oil bath temperature control unit |
|
Media-specific optional features: |
Electronic balance, steel cylinder oil bath heating jacket, plate heating, CEM evaporator |
Liquid-Source Evaporation Chamber
Category:
- Product Description
-
Application areas: The semiconductor material delivery system primarily utilizes a carrier gas and incorporates an oil-bath temperature-control unit to heat the delivery vessel, converting liquid-source semiconductor materials into gaseous form. This enables highly precise, safe, and stable delivery to process equipment.
Process Application: Continuous vapor delivery from a liquid-source vaporizer, carrier-gas transport, MFC-controlled flow, oil-bath heating, and CEM evaporation, among others.
Customer Type: Semiconductor chip manufacturing, flat-panel display industry, solar cells, electronic component manufacturing, and other industries
Parameter Name
Detailed Specifications
Supply Type:
Single cylinder + buffer tank, dual cylinders
Board dimensions:
1/4", 1/2"
Media Name:
TMA, TEOS, TEB, TEPO, MTS, TCS, SiCl4, TiCl4, etc.
Basic functions:
Automatic purging, automatic vacuuming, automatic switching, automatic shutdown, touch-screen operation
General optional features:
Waste liquid tank, dual-bottle supply (source liquid bottle), 1+1 dual-bottle supply (original liquid bottle + buffer tank), oil bath temperature control unit
Media-specific optional features:
Electronic balance, steel cylinder oil bath heating jacket, plate heating, CEM evaporator
Related Products
BSGS High-Flow Specialty Gas Delivery Equipment
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