Bubbler bubbling cabinet
Category:
Application areas: The bubbling cabinet uses hydrogen as the carrier gas and is equipped with a chiller to vaporize liquid silicon-containing compounds, thereby supplying gaseous silicon-containing compounds to the process equipment.
Process Application: Continuous liquid-source delivery with carrier-gas-assisted transport
Customer Type: Semiconductor chip manufacturing, flat-panel display industry, solar cells, electronic component manufacturing, and other industries
|
Parameter Name |
Detailed Specifications |
|
Supply Type: |
Single bottle, double bottle |
|
Board dimensions: |
1/4", 1/2" |
|
Media Name: |
TCS |
|
Basic functions: |
Automatic purging, automatic vacuuming, automatic shut-off, touch-screen operation |
|
General optional features: |
Bubble counter, water bath heating, CHILLER |
|
Media-specific optional features: |
Electronic scale, cylinder heating, pan surface heating |
Bubbler bubbling cabinet
Category:
- Product Description
-
Application areas: The bubbling cabinet uses hydrogen as the carrier gas and is equipped with a chiller to vaporize liquid silicon-containing compounds, thereby supplying gaseous silicon-containing compounds to the process equipment.
Process Application: Continuous liquid-source delivery with carrier-gas-assisted transport
Customer Type: Semiconductor chip manufacturing, flat-panel display industry, solar cells, electronic component manufacturing, and other industries
Parameter Name
Detailed Specifications
Supply Type:
Single bottle, double bottle
Board dimensions:
1/4", 1/2"
Media Name:
TCS
Basic functions:
Automatic purging, automatic vacuuming, automatic shut-off, touch-screen operation
General optional features:
Bubble counter, water bath heating, CHILLER
Media-specific optional features:
Electronic scale, cylinder heating, pan surface heating
Related Products
BSGS High-Flow Specialty Gas Delivery Equipment
MESSAGE
If you have any suggestions, please leave a message or send us an email, and we will reply to you as soon as possible after receiving your message.
Phone
Address
No. 99, Baiyun Road, Economic and Technological Development Zone, Hefei City, Anhui Province