• CDM Chemical Supply Cabinet
CDM Chemical Supply Cabinet
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CDM Chemical Supply Cabinet

Application areas: Primarily used for the conveyance of various electronic chemicals, such as acidic and alkaline chemicals and organic solvents.
Keyword: CDM Chemical Supply Cabinet

Application areas: Primarily used for the conveyance of various electronic chemicals, such as acidic and alkaline chemicals and organic solvents.

Process Application: Continuous delivery, filtration, sampling, and recirculation of chemicals.

Customer Type: Semiconductor chip manufacturing, flat-panel display industry, solar cells, electronic component manufacturing, and other industries

Parameter Name

Detailed Specifications

Packaging source type:

200L, 1000L

Panel material:

PFA tubing with a PP housing, PFA tubing with a stainless steel housing, SS316L EP tubing with a stainless steel housing

Supply Capacity:

0~150 slpm

Basic functions:

Two pumps are configured as one working and one standby; sampling and circulation are performed. A leak-detection sensor is installed at the drain port at the bottom of the cabinet; upon detection of a liquid leak, the system will automatically stop fluid supply and trigger an alarm in accordance with the preset settings.

General optional features:

Barcode scanner, DIP switch, touch screen, gas-liquid separator, damper, filter

Media-specific optional features:

FFU, CO2 fire suppression system

CDM Chemical Supply Cabinet


Application areas: Primarily used for the conveyance of various electronic chemicals, such as acidic and alkaline chemicals and organic solvents.
Keyword: CDM Chemical Supply Cabinet
  • Product Description
  • Application areas: Primarily used for the conveyance of various electronic chemicals, such as acidic and alkaline chemicals and organic solvents.

    Process Application: Continuous delivery, filtration, sampling, and recirculation of chemicals.

    Customer Type: Semiconductor chip manufacturing, flat-panel display industry, solar cells, electronic component manufacturing, and other industries

    Parameter Name

    Detailed Specifications

    Packaging source type:

    200L, 1000L

    Panel material:

    PFA tubing with a PP housing, PFA tubing with a stainless steel housing, SS316L EP tubing with a stainless steel housing

    Supply Capacity:

    0~150 slpm

    Basic functions:

    Two pumps are configured as one working and one standby; sampling and circulation are performed. A leak-detection sensor is installed at the drain port at the bottom of the cabinet; upon detection of a liquid leak, the system will automatically stop fluid supply and trigger an alarm in accordance with the preset settings.

    General optional features:

    Barcode scanner, DIP switch, touch screen, gas-liquid separator, damper, filter

    Media-specific optional features:

    FFU, CO2 fire suppression system

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