Developer Temperature Control Unit
Category:
Application areas: Primarily used in the transition zone of photolithography developer solutions.
Process Application: Secondary pressurized delivery of the developer solution using a PID-controlled temperature tank, with integrated online heating and cooling.
Customer Type: Semiconductor chip manufacturing, the flat-panel display industry, solar cells, and electronic component manufacturing, among others.
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Parameter Name |
Detailed Specifications |
|
Device Type: |
Fully Automatic Heat Exchange |
|
Transit cabinet configuration: |
Pneumatic pump and valve, 200L heat exchange tank with level switch, cooling coil, straight heating element, PT-100 temperature sensor, reflux atomizing nozzle, chiller (ice water machine) |
|
Pipeline size: |
1/2”~1” (15~30 LPM) |
|
Basic functions: |
Automatic circulation and replenishment, online heating and cooling, PID temperature control, anti-oxidation and crystallization design, and conveying function. |
|
General optional features: |
Online ICP-MS sampling with 200 L drum motor stirring and rinsing functions |
|
Media-specific optional features: |
Developing solutions, slurries, and temperature-sensitive media |
Developer Temperature Control Unit
Category:
- Product Description
-
Application areas: Primarily used in the transition zone of photolithography developer solutions.
Process Application: Secondary pressurized delivery of the developer solution using a PID-controlled temperature tank, with integrated online heating and cooling.
Customer Type: Semiconductor chip manufacturing, the flat-panel display industry, solar cells, and electronic component manufacturing, among others.
Parameter Name
Detailed Specifications
Device Type:
Fully Automatic Heat Exchange
Transit cabinet configuration:
Pneumatic pump and valve, 200L heat exchange tank with level switch, cooling coil, straight heating element, PT-100 temperature sensor, reflux atomizing nozzle, chiller (ice water machine)
Pipeline size:
1/2”~1” (15~30 LPM)
Basic functions:
Automatic circulation and replenishment, online heating and cooling, PID temperature control, anti-oxidation and crystallization design, and conveying function.
General optional features:
Online ICP-MS sampling with 200 L drum motor stirring and rinsing functions
Media-specific optional features:
Developing solutions, slurries, and temperature-sensitive media
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